JPH0536226Y2 - - Google Patents

Info

Publication number
JPH0536226Y2
JPH0536226Y2 JP1987096536U JP9653687U JPH0536226Y2 JP H0536226 Y2 JPH0536226 Y2 JP H0536226Y2 JP 1987096536 U JP1987096536 U JP 1987096536U JP 9653687 U JP9653687 U JP 9653687U JP H0536226 Y2 JPH0536226 Y2 JP H0536226Y2
Authority
JP
Japan
Prior art keywords
probe card
measured
heating element
workpiece
mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987096536U
Other languages
English (en)
Japanese (ja)
Other versions
JPS642166U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987096536U priority Critical patent/JPH0536226Y2/ja
Publication of JPS642166U publication Critical patent/JPS642166U/ja
Application granted granted Critical
Publication of JPH0536226Y2 publication Critical patent/JPH0536226Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987096536U 1987-06-25 1987-06-25 Expired - Lifetime JPH0536226Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987096536U JPH0536226Y2 (en]) 1987-06-25 1987-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987096536U JPH0536226Y2 (en]) 1987-06-25 1987-06-25

Publications (2)

Publication Number Publication Date
JPS642166U JPS642166U (en]) 1989-01-09
JPH0536226Y2 true JPH0536226Y2 (en]) 1993-09-13

Family

ID=30962377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987096536U Expired - Lifetime JPH0536226Y2 (en]) 1987-06-25 1987-06-25

Country Status (1)

Country Link
JP (1) JPH0536226Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5600520B2 (ja) * 2010-08-25 2014-10-01 日本電子材料株式会社 プローブカード

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS596552A (ja) * 1982-07-05 1984-01-13 Hitachi Ltd 多ピンプロ−バ

Also Published As

Publication number Publication date
JPS642166U (en]) 1989-01-09

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